Dielectric behavior of bilayer films of P(VDF-CTFE) and low temperature PECVD fabricated Si3N4

标题
Dielectric behavior of bilayer films of P(VDF-CTFE) and low temperature PECVD fabricated Si3N4
作者
关键词
-
出版物
出版商
Institute of Electrical and Electronics Engineers (IEEE)
发表日期
2011-03-30
DOI
10.1109/tdei.2011.5739450

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