期刊
IEEE SENSORS JOURNAL
卷 12, 期 7, 页码 2444-2452出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/JSEN.2012.2192426
关键词
Chemiresistor; complementary-metal-oxide semiconductor (CMOS) monolithic sensor array; gas chromatography (GC) detector; mu GC
资金
- Science and Technology Directorate of the U.S. Department of Homeland Security [06-G-024]
- National Institute for Occupational Safety Health [OH009644]
Miniaturized detector arrays are critical to reducing size and maintaining measurement quality of integrated microgas chromatographs (mu GC) used for the analysis of complex vapor mixtures. This paper presents an array of chemiresistors (CRs) with monolayer-protected gold nanoparticle films formed on the surface of a complementary-metal-oxide semiconductor (CMOS) readout chip, featuring high-resolution resistance measurement with adaptive cancellation of baseline resistance. The 8-channel readout circuit occupies 2.2 x 2.2 mm(2) in 0.5 mu m CMOS and consumes 66 mu W per channel from a 3.3-V power supply. It achieves a worst-case resolution of 125 ppm over a broad baseline resistance range of 60 k Omega to 10 M Omega, equivalent to 122 dB dynamic range. Implementation of the CMOS monolithic detector array is discussed, and preliminary measurement results using chamber exposures to several vapors are presented. Eventual integration into a mu GC is discussed.
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