4.7 Article

Ultrasensitive Pd-Ag/ZnO/Nickel Alloy-Based Metal-Insulator-Metal Methane Sensor on Micromachined Silicon Substrate

期刊

IEEE SENSORS JOURNAL
卷 12, 期 7, 页码 2526-2527

出版社

IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/JSEN.2012.2195166

关键词

High sensitivity; methane sensor; micro-electromechanical systems; Ni-alloy microheater; Pd-Ag/ZnO/nickel-alloy metal-insulator-metal structure

资金

  1. CSIR, Department of Science and Technology
  2. AICTE, Government of India

向作者/读者索取更多资源

A novel Pd-Ag/ZnO/Nickel alloy Metal-Insulator-Metal (MIM) sensor on micromachined silicon platform, for efficient methane detection, is reported in this letter. The co-planar microheater and lower electrode of the MIM sensor were fabricated using an alloy (called DilverP1) of nickel. The Ni-alloy was found to offer an Ohmic contact with ZnO sensing layer. Nanostructured ZnO was deposited on lower electrode by a low temperature chemical process and Pd-Ag (70%) was used as the top catalytic electrode to ZnO. A study of the current-voltage characteristics of the MIM structure in pure N-2 with the presence and absence of desired concentration of methane revealed that the device can be used as a low-temperature methane sensor with ultrahigh sensitivity and fast response. The response magnitude and response/recovery time were studied at different temperatures (100, 130, 160, 190, and 220 degrees C) for different methane concentrations. 190 degrees C was found to be the optimum temperature for maximum response of similar to 316% and minimum time of response of 18 s at 1% methane in N-2.

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