Reactive Ion Etching of Columnar Nanostructured ${\rm TiO}_{2}$ Thin Films for Modified Relative Humidity Sensor Response Time

出版年份 2009 全文链接

标题

作者

关键词

出版物

IEEE SENSORS JOURNAL

Volume 9, Issue 12, Pages 1979-1986

出版商

Institute of Electrical and Electronics Engineers (IEEE)

发表日期

2009-11-17

DOI

10.1109/jsen.2009.2032413

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IEEE SENSORS JOURNAL

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Protocol

Reagent

Reprint

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