Article
Automation & Control Systems
Qiu Xu, Raed Alahmdi, Lvjun Wang, Rodrigo T. Rocha, Mohammad I. Younis
Summary: In this article, a multithreshold microelectromechanical tunable inertial switch is introduced, aiming to provide quantitative information on acceleration while being energy-saving. The device is composed of serpentine springs, a suspended proof mass, and stationary electrodes, allowing for measurement of acceleration in different ranges. Experimental and simulation results validate the reliability and effectiveness of the device concept.
IEEE-ASME TRANSACTIONS ON MECHATRONICS
(2023)
Article
Automation & Control Systems
Chong Li, Yuchen Wang, Choon Ki Ahn, Chengxi Zhang, Bo Wang
Summary: In this article, an ultraprecise frequency tuning solution is proposed to improve the bias repeatability of axi-symmetry micro gyroscopes. The gyroscope dynamics are analyzed to identify the major error source as the frequency split. Advanced frequency tracker and precision tuning architecture are developed to achieve state-of-the-art bias repeatability. Experimental results demonstrate significant improvement with a turn-ON to turn-ON bias repeatability of 3.6 (?)/h, which is orders of magnitude better than conventional solutions.
IEEE TRANSACTIONS ON INDUSTRIAL ELECTRONICS
(2023)
Article
Automation & Control Systems
Yuchen Wang, Jiakun Hou, Chong Li, Jin Wu, Yu Jiang, Ming Liu, John Y. Hung
Summary: This article proposes a modified mode reversal scheme to reduce the measurement dead zone limitations of CVGs. The scheme, based on iterative learning control, improves reversal speed, reduces overshoot, and exhibits robustness to environmental variations, as demonstrated through theoretical analysis and experimental verification.
IEEE-ASME TRANSACTIONS ON MECHATRONICS
(2022)
Review
Engineering, Electrical & Electronic
Qiu Xu, Mohammad Younis
Summary: This paper presents a comprehensive review of recent advances in micromachined inertial switches/triggers, focusing on their advantages and disadvantages, sensitive directions, mechanisms of contact-enhancement, threshold accuracy, and tunability of the acceleration threshold. The paper also highlights various applications in healthcare, structural health monitoring, internet of things, and military, and discusses the latest research directions including multi-directions/axis, multi-threshold sensors, and machine learning implementation.
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
(2022)
Article
Engineering, Electrical & Electronic
Alison E. Hake, Chuming Zhao, Wang-Kyung Sung, Karl Grosh
Summary: The study introduces a piezoelectric MEMS accelerometer designed for auditory prostheses, providing analytic models for sensitivity and noise to optimize sensor designs. An experimental device with high sensitivity and low input noise was tested, showing promising results for potential applications in auditory prostheses.
IEEE SENSORS JOURNAL
(2021)
Article
Engineering, Electrical & Electronic
Meiyan Zhang, Qisong Wang, Dan Liu, Boqi Zhao, Jiaze Tang, Jinwei Sun
Summary: This study proposed a multi-degree-of-freedom MEMS gait detection method to address the issues of single sensor and limited gait phase in gait detection. By utilizing sensor-based signal acquisition and feature analysis algorithm, the classification of gait phase information and improvement of accuracy were successfully achieved.
IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT
(2021)
Article
Engineering, Electrical & Electronic
Marco De Pace, Paolo Frigerio, Carlo Valzasina, Luca Falorni, Pietro Peliti, Valentina Zega, Giacomo Langfelder
Summary: This letter analyzes the potential improvements of a commercial yaw MEMS gyroscope for automotive applications by modifying specific operating parameters and calibration settings, resulting in a significant reduction of noise and increased stability.
IEEE SENSORS LETTERS
(2023)
Review
Chemistry, Analytical
Jiong Pan, Chenyu Bai, Qincheng Zheng, Huikai Xie
Summary: In the last decade, piezoelectric micromachined ultrasonic transducer (pMUT) rangefinders have experienced rapid development. These rangefinders have attracted extensive attention for mobile range-finding due to their high output pressure for long-range detection and low power consumption (16 µW for over 1 m range detection has been reported). Various strategies, including the utilization of pMUT arrays, advanced device structures, and novel piezoelectric materials, as well as improvements in range-finding methods, have been developed to enhance the performance of pMUT rangefinders. This work provides a brief introduction to the working principle of pMUT rangefinders, followed by an extensive overview of recent advancements that improve their performance, including advanced pMUT devices and range-finding methods used in pMUT rangefinder systems. Additionally, several derivative systems of pMUT rangefinders enabling broader applications are presented.
Review
Engineering, Electrical & Electronic
Yuchen Wang, Rui Cao, Chong Li, Robert N. Dean
Summary: The ovenized MEMS gyroscope isolates the die from the external environment and utilizes a closed-loop temperature control system to improve temperature stability and performance. The comprehensive review covers principles, key technologies, state-of-the-art results, and suggestions for future development, including thermal error mechanisms, temperature control methods, and heat dissipation models.
IEEE SENSORS JOURNAL
(2021)
Article
Engineering, Electrical & Electronic
Hakan Carlsson, Isaac Skog, Joakim Jalden
Summary: This paper presents a maximum likelihood estimator for self-calibrating accelerometers and gyroscopes in an inertial sensor array, which does not require external equipment. The estimator uses a computationally efficient iterative optimization method and is evaluated through real-world experiments and simulations, showing consistent parameter estimation and significant improvement in accuracy.
IEEE SENSORS JOURNAL
(2021)
Article
Engineering, Electrical & Electronic
Madan Parajuli, Guillermo Sobreviela, Milind Pandit, Hemin Zhang, Ashwin A. Seshia
Summary: This paper presents experimental characterization of a vacuum packaged bulk acoustic wave disk gyroscope with T-shape anchors on a (100) single-crystal silicon substrate. By implementing mode matching using electrostatic frequency tuning, the frequency split between two near-degenerate bulk acoustic modes was decreased, improving device performance parameters. Gyroscopic operation demonstrated high quality factors and improved mechanical sensitivity.
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
(2021)
Article
Chemistry, Analytical
Daniele Giannini, Giacomo Bonaccorsi, Francesco Braghin
Summary: This paper introduces a novel design and optimization environment for inertial MEMS devices, which is able to rapidly prototype and validate its effectiveness through comparison with more complex models. The presented design tool handles the parametric generation of structure geometry, dynamic behavior simulation, layout optimization, etc., meeting typical design requirements in the MEMS industry.
Article
Engineering, Electrical & Electronic
Zsigmond Pentek, Tobias Hiller, Andras Czmerk
Summary: This paper introduces a novel fusion algorithm that combines cost-efficient tri-axial consumer sensors with single-axis vibration-robust automotive sensors to provide a virtual sensor output with low noise and good external vibration disturbance mitigation. A two-stage fusion algorithm called topological conflict measure (TCM) is proposed to address conflicting sensor signals caused by vibration influences, utilizing weighted sums to improve fusion of redundant devices. Comparison with other methods such as Bayesian averaging, Dempster-Shafer Evidence Theory, Kalman filtering, and fuzzy inference system shows that TCM, Kalman filtering, and fuzzy inference system achieve the best vibration rejection, with TCM demonstrating the best computational efficiency and adaptability to other types of redundant sensor setups.
IEEE SENSORS JOURNAL
(2021)
Article
Engineering, Electrical & Electronic
Hai Yang, Shanjun Gao, Suqi Liu, Lizao Zhang, Shun Luo
Summary: This article proposes a vibration error identification and suppression method for MEMS inertial sensors of near-bit inclinometers. By analyzing the characteristics of the vibration signal, an error model is established for the gyroscope and accelerometer, and a vibration error suppression model is established based on the KF and UKF algorithms. Experimental results show that this method can effectively suppress measurement errors and maintain measurement stability.
IEEE SENSORS JOURNAL
(2022)
Article
Engineering, Electrical & Electronic
Hani H. Tawfik, Navpreet Singh, Mohannad Y. Elsayed, Frederic Nabki, Mourad N. El-Gamal
Summary: This paper introduces a novel operation mechanism for ultrasonic testing in-water, which utilizes surface-tension forces to elongate the water column and focus the ultrasonic beam. The proposed meniscus-mode operation mechanism is shown to amplify the ultrasonic signal compared to traditional fully-immersed setup, with a measured improvement in signal strength by a factor of approximately 2.24x.
SENSORS AND ACTUATORS A-PHYSICAL
(2021)
Article
Chemistry, Analytical
Sina Askari, Mohammad H. Asadian, Andrei M. Shkel
Summary: This paper presents the characterization and analysis of a silicon micromachined Quad Mass Gyroscope in the rate mode of operation, evaluating trade-offs between full-scale, linearity, and noise characteristics of QMGs with different Q-factors. Results show that a higher Q-factor improves frequency stability and noise performance, but implementation of digital control loops faces challenges.
Article
Engineering, Electrical & Electronic
Chi-Shih Jao, Andrei M. Shkel
Summary: This research focuses on the placement of inertial sensors on footwear for pedestrian inertial navigation, and proposes a reconstruction filter to reduce localization errors due to insufficient Full Scale Range (FSR) of sensors. Experimental results show that applying the reconstruction filter significantly improves the accuracy of the navigation system.
IEEE SENSORS JOURNAL
(2022)
Article
Engineering, Electrical & Electronic
Daryosh Vatanparvar, Andrei M. Shkel
Summary: In this paper, the issue of ellipticity in CVG operating in WA mode was studied. Simulation and experimental results showed that although a PI controller can reduce quadrature, it cannot fully eliminate ellipticity. The study also found that residual quadrature affects precession, leading to angular drift and angle bias errors. By increasing the feedback control gain and operating in a mode-matched condition, residual quadrature and its effects on precession can be reduced.
IEEE SENSORS JOURNAL
(2022)
Article
Engineering, Electrical & Electronic
Danmeng Wang, Andrei M. Shkel
Summary: This work investigates the impact of Electromechanical Amplitude Modulation (EAM) on energy dissipation and non-linear dynamics in MEMS Coriolis Vibratory Gyroscopes (CVGs). By presenting an analytical model and experimental demonstration, it is found that the AC carrier signal in EAM affects the amplitude-frequency couplings, scale factor instability, and in-run noise performance of the gyroscope.
IEEE SENSORS JOURNAL
(2022)
Article
Engineering, Electrical & Electronic
Daryosh Vatanparvar, Danmeng Wang, Andrei M. Shkel
Summary: This paper presents the instrumentation results of a Dynamically-Amplified Gyroscope (DAG) for direct angle measurement. By mathematical modeling and control methods, the direct angle measurement capability of the 4-DoF DAG was successfully demonstrated. The research results support the reduced-order model and provide an approach to reduce control complexity.
IEEE SENSORS JOURNAL
(2022)
Article
Engineering, Electrical & Electronic
Chi-Shih Jao, Andrei M. Shkel
Summary: The paper proposes a Foot-Instability-Based Adaptive (FIBA) covariance to dynamically adjust the covariance matrix for pseudo-zero-velocity measurements in ZUPT-aided INS. The FIBA covariance is implemented in an EKF framework, eliminating the need for a binary stance phase detector. Experimental results show significant improvements in navigation accuracy using the proposed system.
IEEE SENSORS JOURNAL
(2021)
Article
Engineering, Electrical & Electronic
Ali A. Abdallah, Chi-Shih Jao, Zaher M. Kassas, Andrei M. Shkel
Summary: A signal-sensor-based indoor pedestrian navigation system is proposed in this study, utilizing INS and LTE signals with different coupling architectures to achieve good navigation accuracy in indoor environments.
IEEE SENSORS JOURNAL
(2022)
Article
Engineering, Electrical & Electronic
Chi-Shih Jao, Ali A. Abdallah, Changwei Chen, Min-Won Seo, Solmaz S. Kia, Zaher M. Kassas, Andrei M. Shkel
Summary: This paper presents a Pedestrian Indoor Navigation system (PINDOC) that integrates Deterministic, Opportunistic, and Cooperative functionalities for multi-agent navigation. The system utilizes various sensors and techniques to achieve high accuracy in navigation.
IEEE SENSORS JOURNAL
(2022)
Article
Engineering, Electrical & Electronic
Mohammad H. Asadian, Danmeng Wang, Andrei M. Shkel
Summary: This paper presents a 3-D fused quartz dual-shell microstructure designed as a MEMS gyroscope. The dual-shell was fabricated through plastic deformation of fused quartz and advanced bonding and glassblowing processes. The study includes the development of a fabrication process, simulation of quartz deformation using a Finite Element model, and a modeling framework for designing resonators and predicting their response. The prototype dual-shell resonator demonstrated high performance with Q-factors of 1.83 million and long ringdown time. The integration of an electrode substrate allowed for electrostatic excitation and detection, and the gyroscope operation showed promising results. The proposed structure has the potential to be used as a resonator, gyroscope, or other vibratory sensors in harsh environments.
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
(2022)
Article
Engineering, Electrical & Electronic
Danmeng Wang, Mohammad H. Asadian, Wei Guan, Doreen Hii, Austin R. Parrish, Andrei M. Shkel
Summary: This paper investigates the effects of metal coating on FS Micro-machined Hemispherical Resonator Gyroscopes, focusing on the trade-offs between metallization, quality factor, conductivity, and noise characteristics, and draws conclusions through analysis and experimental verification.
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
(2022)
Article
Engineering, Electrical & Electronic
Danmeng Wang, Nicholas A. Strnad, Andrei M. Shkel
Summary: This letter presents a study on an indirect excitation method for gyro operation in FS hemispherical resonator dual-shell gyroscopes (DSGs). By utilizing mechanical coupling, the energy is transferred to the inner device shell, preserving the high Q-factor.
IEEE SENSORS LETTERS
(2023)
Article
Engineering, Electrical & Electronic
Austin R. Parrish, Chi-Shih Jao, Andrei M. Shkel
Summary: This letter presents a study on the navigational accuracy of crawling using heel and knee-mounted inertial measurement units (IMU). The results show that the knee-mounted IMU provides better navigation accuracy compared with the heel-mounted IMU, and accelerometer-based zero-velocity detectors perform better for the knee-mounted IMU.
IEEE SENSORS LETTERS
(2022)
Article
Engineering, Electrical & Electronic
Changwei Chen, Chi-Shih Jao, Andrei M. Shkel, Solmaz S. Kia
Summary: This study examines the influence of ultra-wideband (UWB) sensor placement on the accuracy of a pedestrian inertial navigation solution that utilizes zero velocity update and foot-to-foot ranging feedback. Various sensor configurations are investigated in both static and dynamic scenarios, with the root mean square error and circular error probable used as performance metrics.
IEEE SENSORS LETTERS
(2022)
Article
Engineering, Electrical & Electronic
Yusheng Wang, Andrei M. Shkel
Summary: This study introduces a method for detecting floor types, which can accurately identify different floor types and adaptively estimate navigation states in pedestrian inertial navigation, resulting in reduced navigation errors.
IEEE SENSORS LETTERS
(2021)
Article
Engineering, Electrical & Electronic
Doreen Hii, Daryosh Vatanparvar, Andrei M. Shkel
Summary: This paper presents results on optimizing photoresist plating molds for patterning of a nickel masking layer. The study shows that exposure dose, exposure contact mode, developer dilution ratio, and PR type can be adjusted to achieve desirable plating mold attributes. By demonstrating how PR dimensions decrease with increased exposure dose and improving sidewall angles through exposure dose control and vacuum contact exposure mode, the researchers were able to achieve smooth PR sidewalls and controlled dimensions in the etching experiment.
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
(2021)
