期刊
IEEE SENSORS JOURNAL
卷 9, 期 5-6, 页码 609-615出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/JSEN.2009.2020193
关键词
CMOS sensors; electrochemistry; lab-on-a-chip; microelectrode; microelectrode array (MEA); microfluidics; potentiostat
资金
- National Science Foundation
- Catalyst Foundation
- MOSIS
Microelectrode arrays (MEAs) offer numerous benefits over macroelectrodes due to their smaller sample size requirement, small form factor, low-power consumption, and higher sensitivity due to increased rates of mass transport. These features make MEAs well suited for microfluidic lab-on-a-chip applications. This paper presents two implementations of MEAs with and without an on chip potentiostat. We first describe an 8 x 8 array of 6 mu m circular microelectrodes with center to center 37 mu m spacing fabricated on silicon using conventional microfabrication techniques. Pads are provided for external connections to a potentiostat for electrochemical analysis. The second implementation is an individually addressable 32 x 32 array of 7 mu m square microelectrodes with 37 mu m center to center spacing on a CMOS chip with built-in very-large-scale integration potentiostat for electrochemical analysis. The integrated CMOS MEA is post processed at the die level to coat the exposed Al layers with Au. To verify microelectrode array behavior with individual addressability, cyclic voltammetry was performed using a potassium ferricyanide (K3Fe(CN)(6))) solution.
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