期刊
IEEE PHOTONICS TECHNOLOGY LETTERS
卷 20, 期 5-8, 页码 434-436出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/LPT.2008.916969
关键词
gratings; mirrors; optical communication; optical microelectromechanical systems; vertical-cavity surface-emitting laser (VCSEL)
We report the experimental demonstration of a large fabrication tolerance for a single-layer, highly reflective high-index-contrast subwavelength grating (HCG) mirror. HCG vertical-cavity surface-emitting lasers (VCSELs) are demonstrated with +/- 20% variation in the HCG critical dimension. Emission wavelength of the HCG-VCSEL shifts only 2 nm with 40% change in grating spacing and 8% change in grating period.
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