4.7 Article

Silicon-on-Insulator Spectral Filters Fabricated With CMOS Technology

出版社

IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/JSTQE.2009.2039680

关键词

Arrayed waveguide grating (AWG); echelle grating; nanophotonics; photonic wire; planar concave grating (PCG); ring resonator; silicon-on-insulator (SOI); silicon photonics

资金

  1. European Union
  2. WaDiMOS
  3. ePIXnet
  4. ICT-HELIOS
  5. Belgian projects IAP-PHOTONnetwork
  6. IAP photonics@be
  7. Dutch Smart-Mix MEMPHIS
  8. Flemish Research Foundation (FWO-Vlaanderen)
  9. Institute for the Promotion of Innovation through Science and Technology in Flanders (IWT-Vlaanderen) under

向作者/读者索取更多资源

We give an overview of recent progress in passive spectral filters and demultiplexers based on silicon-on-insulator photonic wire waveguides: ring resonators, interferometers, arrayed waveguide gratings, and echelle diffraction gratings, all benefit from the high-index contrast possible with silicon photonics. We show how the current generation of devices has improved crosstalk levels, insertion loss, and uniformity due to an improved fabrication process based on 193 nm lithography.

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