Hopping effect of hydrogen-doped silicon oxide insert RRAM by supercritical CO2 fluid treatment

标题
Hopping effect of hydrogen-doped silicon oxide insert RRAM by supercritical CO2 fluid treatment
作者
关键词
-
出版物
IEEE ELECTRON DEVICE LETTERS
Volume 34, Issue 5, Pages 617-619
出版商
Institute of Electrical and Electronics Engineers (IEEE)
发表日期
2013-04-04
DOI
10.1109/led.2013.2251995

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