期刊
IEEE ELECTRON DEVICE LETTERS
卷 33, 期 3, 页码 366-368出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/LED.2011.2179972
关键词
AlGaN/GaN heterostructure field-effect transistor (HFET); bulk GaN thermal conductivity; Raman thermography; thermal boundary resistance
资金
- Office of Naval Research (ONR)
- ONR Global through the DRIFT
- Air Force Research Laboratory through Kyma Technologies Inc.
Micro-Raman thermography, microphotoluminescence spectroscopy, and thermal simulation were used to study the thermal properties of AlGaN/GaN heterostructure field-effect transistors grown on semi-insulating bulk GaN substrates. A bulk GaN thermal conductivity of 260 W . m(-1) . K-1 was determined from temperature measurements on operating devices in combination with finite-difference thermal simulations. This is significantly higher than typical thin GaN epilayer thermal conductivities, due to a lower dislocation density in bulk GaN. Despite the thermal conductivity of bulk GaN being lower than that of SiC, transistors on bulk GaN exhibited a similar thermal resistance as GaN-on-SiC devices, attributed to the absence of a thermal boundary resistance between the device epilayers and substrate for GaN-on-GaN devices.
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