Performance of 5-nm a-IGZO TFTs With Various Channel Lengths and an Etch Stopper Manufactured by Back UV Exposure

标题
Performance of 5-nm a-IGZO TFTs With Various Channel Lengths and an Etch Stopper Manufactured by Back UV Exposure
作者
关键词
-
出版物
IEEE ELECTRON DEVICE LETTERS
Volume 33, Issue 6, Pages 824-826
出版商
Institute of Electrical and Electronics Engineers (IEEE)
发表日期
2012-04-28
DOI
10.1109/led.2012.2191132

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