期刊
IEEE ELECTRON DEVICE LETTERS
卷 33, 期 6, 页码 872-874出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/LED.2012.2190131
关键词
Electroplated Ni-CNT nanocomposite; microelectromechanical systems (MEMS); quality factor; resonant frequency; resonator
资金
- National Science Council (NSC) [100-2220-E-009-007, NSC 97-2221-E-009-020-MY3]
- Ministry of Education in Taiwan under the ATU Program
In this letter, electroplated Ni-CNT nanocomposite is synthesized and utilized as a structural material for micromechanical resonator fabrication. Pretreated by sulfate sodium dodecyl, carbon nanotubes (CNTs) disperse well in electrolyte and can be incorporated in an electroplated Ni film. Clamped-clamped beam resonators fabricated using the nanocomposite show similar to 27% resonant frequency enhancement (from 498.75 to 634.72 kHz). Meanwhile, the Q factors of 781 and 760 for Ni and Ni-CNT nanocomposite resonators, which are comparable with the prior art, indicate that the anchor loss could dominate the Q performance of the beam resonators.
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