期刊
IEEE ELECTRON DEVICE LETTERS
卷 32, 期 11, 页码 1606-1608出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/LED.2011.2165522
关键词
Temperature measurement; temperature sensors; thermoelectric devices; thin-film thermocouples (TFTCs)
资金
- National Science Foundation of China [11074010, 60925003]
- Ministry of Science and Technology of China [2011CB933002]
This letter reports on a technique to obtain time-resolved 2-D mapping of local temperatures on a solid substrate by employing an array of Cr-Ni thin-film thermocouples (TFTCs). Using 100-nm-thick Cr-Ni TFTCs, a stable and reproducible thermopower of 26.2 +/- 1.5 mu V/K with temperature resolutions better than 0.1 K was obtained. Investigation showed that the thermopower of these thermocouples had no obvious dependence on their junction area down to 3 x 3 mu m(2). In an array of 18 individual thermocouples, a relative standard deviation of 0.31% was measured for the thermopower. This technique may have applications in, e.g., thermal failure analysis, real-time and on-site thermal sensing for integrated circuits, and other modern electronic, optical, and thermal devices.
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