First Insight Into the Lifetime Acceleration Model of High-$k$$\hbox{ZrO}_{2}/\hbox{SiO}_{2}/\hbox{ZrO}_{2}$ Stacks for Advanced DRAM Technology Nodes

标题
First Insight Into the Lifetime Acceleration Model of High-$k$$\hbox{ZrO}_{2}/\hbox{SiO}_{2}/\hbox{ZrO}_{2}$ Stacks for Advanced DRAM Technology Nodes
作者
关键词
-
出版物
IEEE ELECTRON DEVICE LETTERS
Volume 30, Issue 4, Pages 340-342
出版商
Institute of Electrical and Electronics Engineers (IEEE)
发表日期
2009-02-10
DOI
10.1109/led.2009.2012520

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