SONOS-Type Flash Memory Cell With Metal$/\hbox{Al}_{2}\hbox{O}_{3}/ \hbox{SiN}/\hbox{Si}_{3}\hbox{N}_{4}/\hbox{Si}$ Structure for Low-Voltage High-Speed Program/Erase Operation

标题
SONOS-Type Flash Memory Cell With Metal$/\hbox{Al}_{2}\hbox{O}_{3}/ \hbox{SiN}/\hbox{Si}_{3}\hbox{N}_{4}/\hbox{Si}$ Structure for Low-Voltage High-Speed Program/Erase Operation
作者
关键词
-
出版物
IEEE ELECTRON DEVICE LETTERS
Volume 29, Issue 5, Pages 512-514
出版商
Institute of Electrical and Electronics Engineers (IEEE)
发表日期
2008-04-29
DOI
10.1109/led.2008.920979

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