A method for measuring electron temperature and ion density with immunity to RF fluctuation and ion current

Improvement of the floating probe method for ion density and electron temperature measurement without compensation due to voltage reduction across the sheath

(2021) Moo-Young Lee et al.   PLASMA SOURCES SCIENCE & TECHNOLOGY

Measurement of the electron energy distribution function in CO2 inductively coupled plasma

(2019) Kyung-Hyun Kim et al.   PHYSICS OF PLASMAS

The radio-frequency fluctuation effect on the floating harmonic method

(2016)   PHYSICS OF PLASMAS

Electron Temperature Measurement by Floating Probe Method Using AC Voltage

(2016) Satoshi Nodomi et al.   PLASMA SCIENCE & TECHNOLOGY

What is the size of a floating sheath?

(2014) P Chabert   PLASMA SOURCES SCIENCE & TECHNOLOGY

Experimental verification of the Boltzmann relation in confined plasmas: Comparison of noble and molecule gases

(2013) Hyo-Chang Lee et al.   PHYSICS OF PLASMAS

Probe measurements of electron-energy distributions in plasmas: what can we measure and how can we achieve reliable results?

(2011) V A Godyak et al.   JOURNAL OF PHYSICS D-APPLIED PHYSICS

In situ method for real time measurement of dielectric film thickness in plasmas

(2010)   JOURNAL OF APPLIED PHYSICS

The plasma sheath around large discs and ion collection by planar Langmuir probes

(2010) T E Sheridan   JOURNAL OF PHYSICS D-APPLIED PHYSICS

Evolution of the electron energy distribution and E-H mode transition in inductively coupled nitrogen plasma

(2010) Hyo-Chang Lee et al.   PHYSICS OF PLASMAS

Measurement of electron temperature and ion density using the self-bias effect in plasmas

(2010) Kwang-Tae Hwang et al.   PHYSICS OF PLASMAS

Electron kinetics in glows—from Langmuir to the present

(2009) L D Tsendin   PLASMA SOURCES SCIENCE & TECHNOLOGY