Innovative Approach of Growing Thulium Oxide Passivation Layer in Nitrogen/Oxygen/Nitrogen Ambient

Title
Innovative Approach of Growing Thulium Oxide Passivation Layer in Nitrogen/Oxygen/Nitrogen Ambient
Authors
Keywords
Thin films, Electrical properties, Dielectric, Semiconductors, Electronic materials
Journal
MATERIALS LETTERS
Volume -, Issue -, Pages 132572
Publisher
Elsevier BV
Online
2022-06-03
DOI
10.1016/j.matlet.2022.132572

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