Surface activated bonding of aluminum oxide films at room temperature

Ultrathin adhesive layer between LiNbO3 and SiO2 for bonded LNOI waveguide applications

(2019) Ryo Takigawa et al.   JAPANESE JOURNAL OF APPLIED PHYSICS

Direct bonding of LiNbO3 and SiC wafers at room temperature

(2019) Ryo Takigawa et al.   SCRIPTA MATERIALIA

Room-temperature wafer bonding of LiNbO3 and SiO2 using a modified surface activated bonding method

(2018) Ryo Takigawa et al.   JAPANESE JOURNAL OF APPLIED PHYSICS

Thin-film lithium niobate-on-insulator waveguides fabricated on silicon wafer by room-temperature bonding method with silicon nanoadhesive layer

(2018) Ryo Takigawa et al.   OPTICS EXPRESS

Surface activated room-temperature bonding in Ar gas ambient for MEMS encapsulation

(2017) Hideki Takagi et al.   JAPANESE JOURNAL OF APPLIED PHYSICS

Room-temperature transfer bonding of lithium niobate thin film on micromachined silicon substrate with Au microbumps

(2017) Ryo Takigawa et al.   SENSORS AND ACTUATORS A-PHYSICAL

Nanoadhesion layer for enhanced Si–Si and Si–SiN wafer bonding

(2011) Ryuichi Kondou et al.   MICROELECTRONICS RELIABILITY